HARMST

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HARMST is an acronym for high aspect ratio microstructure technology, which describes fabrication technologies,

used to create high-aspect-ratio microstructures{{Cite book |last=Gerlach |first=Gerald |url=http://archive.org/details/introductiontomi0000gerl |title=Introduction to microsystem technology : a guide for students |date=2008 |publisher=Chichester, England; Hoboken, NJ : J. Wiley & Sons |others=Internet Archive |isbn=978-0-470-05861-9 |pages=138}} with heights between tens of micrometers up to a centimeter, and aspect ratios greater than 10:1. Examples include the LIGA fabrication process, advanced silicon etch, and deep reactive ion etching.