Henry I. Smith
{{Short description|American inventor and physicist}}
{{use mdy dates|date=October 2024}}
{{Infobox scientist
| name = Henry Isaac Smith
| birth_date = {{Birth date and age|1937|5|26}}
| birth_place = Jersey City, New Jersey, U.S.
| fields = Physics, nanotechnology
| education = * B.Sc. in Physics, College of the Holy Cross, 1958
- M.Sc. in Physics, Boston College, 1960
- Ph.D. in Physics, Boston College, 1966
| workplaces = * Air Force Cambridge Research Laboratories
- Boston College
- Massachusetts Institute of Technology
| known_for = * Nanofabrication techniques
- Attenuated phase-shift mask
- Liquid-immersion lithography
- X-ray lithography advancements
| awards = * IEEE Robert N. Noyce Medal, 2017
}}
Henry I. Smith (born May 26, 1937) is an American inventor and physicist. Smith co-founded two MIT spin-offs, LumArray, Inc., and Sublimit, LLC, further extending the practical applications of his research.{{Cite web |title=Henry Smith |url=https://web.mit.edu/nanomembranes/index_files/Page880.htm |access-date=2024-10-21 |website=web.mit.edu}}
Career and research contributions
Smith was born in Jersey City, New Jersey and raised in Montclair, New Jersey. He graduated in 1958 from the College of the Holy Cross. Smith began his professional career as a first lieutenant in the Air Force Cambridge Research Laboratories from 1960 to 1963. Following his military service, he joined Boston College as an assistant professor of physics. In 1968, he transitioned to the Massachusetts Institute of Technology.{{Cite web |title=Oral history interview with Henry I. Smith |url=https://digital.sciencehistory.org/works/cn5gvmp |access-date=2024-10-21 |website=Science History Institute Digital Collections |language=en}}
At MIT, Smith initially worked at Lincoln Laboratory. He later founded the Nanostructures Laboratory in the Research Laboratory of Electronics at MIT, where he served as director from 1977 to 2007.{{Cite web |title=NanoStructures Laboratory |url=https://www.rle.mit.edu/nanostructures-laboratory/ |website=www.rle.mit.edu}}
Smith is credited with numerous inventions, including the attenuated phase-shift mask and liquid-immersion lithography.{{Cite web |title=Attenuated phase shift mask materials for 248 and 193 nm lithography |url=https://pubs.aip.org/avs/jvb/article/14/6/3719/584922/Attenuated-phase-shift-mask-materials-for-248-and |website=pubs.aip.org}}
Awards and honors
- IEEE Robert N. Noyce Medal in 2017{{Cite web |date=2017-06-04 |title=2017 IEEE Honors: IEEE Robert N. Noyce Medal - Henry I. Smith {{!}} IEEETV |url=https://ieeetv.ieee.org/ieeetv-specials/henry-i-smith-accepts-the-ieee-robert-n-noyce-medal-honors-ceremony-2017 |access-date=2024-10-21 |website=ieeetv.ieee.org |language=en}}
- Member of the National Academy of Engineering and a Fellow of the American Academy of Arts and Sciences{{Cite web |date=2024-10-28 |title=Henry I. Smith {{!}} American Academy of Arts and Sciences |url=https://www.amacad.org/person/henry-i-smith |access-date=2024-10-28 |website=www.amacad.org |language=en}}
- Member of the IEEE
References
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Category:Physicists from New Jersey
Category:American nanotechnologists
Category:Boston College alumni
Category:Massachusetts Institute of Technology faculty
Category:Members of the United States National Academy of Engineering
Category:Scientists from Jersey City, New Jersey
Category:People from Montclair, New Jersey