Microoptomechanical systems

{{Short description|Micro-systems which use optical and mechanical, but not electronic components}}

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Microoptomechanical systems (MOMS), also written as micro-optomechanical systems, are a special class of microelectromechanical systems (MEMS) which use optical and mechanical, but not electronic components.{{cite journal |last1=Dragoman |first1=D |title=Micro/nano-optoeletromechanical Systems |journal=Progress in Quantum Electronics |date=2001 |volume=25 |issue=5-6 |pages=229–290 |doi=10.1016/s0079-6727(01)00012-x |url=https://www.sciencedirect.com/science/article/abs/pii/S007967270100012X |access-date=13 December 2024|url-access=subscription }}