Microsystem Technologies

{{Infobox journal

| title = Microsystem Technologies

| cover =

| editor = B. Michel, B. Bhushan

| discipline = Engineering

| abbreviation = Microsyst. Technol.

| publisher = Springer Science+Business Media

| country =

| frequency = Monthly

| history = 1994-present

| openaccess =

| impact = 1.513

| impact-year = 2018

| website = https://www.springer.com/journal/542

| link2 =

| link2-name =

| JSTOR =

| OCLC = 488207364

| LCCN = 97660016

| CODEN = MCTCEF

| ISSN = 0946-7076

| eISSN = 1432-1858

}}

Microsystem Technologies is a peer-reviewed scientific journal published by Springer Science+Business Media. It covers research on electromechanical, materials, design, and manufacturing aspects of microsystems and their components. The editors-in-chief of the journal are B. Michel (Fraunhofer IZM, Berlin, Germany) and B. Bhushan (Ohio State University).