oxalyl fluoride
{{chembox
| Verifiedfields = changed
| Watchedfields = changed
| verifiedrevid = 415641747
| ImageFileL1 = Oxalyl fluoride.svg
| ImageSizeL1 = 110px
| ImageNameL1 = Structural formula of oxalyl fluoride
| ImageFileR1 = Oxalyl-fluoride-3D-balls.png
| ImageSizeR1 = 120px
| ImageNameR1 = Ball-and-stick model of oxalyl fluoride
| PIN = Oxalyl difluoride
| OtherNames = TL-108
|Section1={{Chembox Identifiers
| CASNo_Ref = {{cascite|correct|??}}
| CASNo = 359-40-0
| UNII_Ref = {{fdacite|correct|FDA}}
| UNII = 2L7RR7QFL9
| PubChem = 9668
| EINECS = 206-630-4
| SMILES = C(=O)(C(=O)F)F
| InChI = 1/C2F2O2/c3-1(5)2(4)6
| ChemSpiderID_Ref = {{chemspidercite|changed|chemspider}}
| ChemSpiderID = 9287
}}
|Section2={{Chembox Properties
| Formula = C2F2O2
| MolarMass = 94.017 g/mol
| Appearance =
| Density =
| MeltingPtC = -3
| BoilingPtC = 26.6
| Solubility =
}}
|Section3={{Chembox Hazards
| MainHazards =
| FlashPt =
| AutoignitionPt =
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Oxalyl fluoride is the organofluorine compound with the formula (COF)2. It is a fluorinated derivative of oxalic acid. This colorless liquid is prepared by reaction of sodium fluoride with oxalyl chloride.{{cite journal|doi=10.1021/jo01081a050|title=Synthesis of Fluorides by Metathesis with Sodium Fluoride|author=C. W. Tullock, D. D. Coffman|journal=J. Org. Chem.|year=1960|volume=25|issue=11|page=2016–2019}}
Oxalyl fluoride is being investigated for use in etching as a replacement for compounds which have the liability of high global warming potential.[http://www.freepatentsonline.com/6635185.html Method of etching and cleaning using fluorinated carbonyl compounds], US Patent 6635185.{{cite journal|title=Evaluation of Oxalyl Fluoride for a Dielectric Etch Application in an Inductively Coupled Plasma Etch Tool|journal=J. Electrochem. Soc.|volume= 148|issue= 3|pages= G141–G149|year=2001|author1=Simon Karecki |author2=Ritwik Chatterjee |author3=Laura Pruette |author4=Rafael Reif |author5=Terry Sparks |author6=Laurie Beu |author7=Victor Vartanian |author8=Konstantin Novoselovc |name-list-style=amp |doi=10.1149/1.1348263|bibcode=2001JElS..148G.141K}}