plasma processing

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Plasma processing is a plasma-based material processing technology that aims at modifying the chemical and physical properties of a surface.{{cite book |last1=National Research Council |title=Plasma Processing of Materials: Scientific Opportunities and Technological Challenges |date=1991 |publisher=National Academies Press |location=Washington, DC |doi=10.17226/1875 |isbn=978-0-309-04597-1 |url=https://doi.org/10.17226/1875}}

Plasma processing techniques include:

• Plasma activation
• Plasma ashing
• Plasma cleaning
• Plasma electrolytic oxidation
• Plasma etching
• Plasma functionalization
• Plasma polymerization
• Corona treatment
• Plasma modification

Related topics are plasma chemistry, chemical vapor deposition, and physical vapor deposition processes like sputter deposition, plasma iondoping, vacuum plasmaspraying, and reactive ion etching.