Journal of Vacuum Science and Technology

{{Infobox journal

| title = Journal of Vacuum Science and Technology

| image =

| caption =

| former_name =

| abbreviation = J. Vac. Sci. Technol.

| discipline = Physics

| language = English

| editor = Eray Aydil

| publisher = American Institute of Physics on behalf of the American Vacuum Society

| country = United States

| history = 1964–present

| frequency = Bimonthly

| openaccess =

| license =

| impact = 2.4 (Part A)
1.5 (Part B)

| impact-year = 2023

| ISSNlabel = Journal of Vacuum Science and Technology

| ISSN = 0022-5355

| eISSN =

| CODEN =

| JSTOR =

| LCCN =

| OCLC =

| ISSNlabel2 = Journal of Vacuum Science and Technology A

| ISSN2 = 0734-2101

| eISSN2 = 1520-8559

| CODEN2 = JVTAD6

| JSTOR2 =

| LCCN2 = 83643441

| OCLC2 = 08697396

| ISSNlabel3 = Journal of Vacuum Science and Technology B

| ISSN3 = 0734-211X

| eISSN3 =

| CODEN3 = JVTBD9

| JSTOR3 =

| LCCN3 = 83642371

| OCLC3 = 08697479

| website = http://scitation.aip.org/content/avs/journal/jvst

| link1 = http://scitation.aip.org/content/avs/journal/jvsta

| link1-name = Part A

| link2 = http://scitation.aip.org/content/avs/journal/jvstb

| link2-name = Part B

}}

The Journal of Vacuum Science and Technology is a peer-reviewed scientific journal published in two parts, A and B, by the American Institute of Physics on behalf of the American Vacuum Society. It was established in 1964 and the editor-in-chief is Eray Aydil (University of Minnesota).