remote plasma

File:B-pab-remoteplasmasystem.png

A remote plasma (also downstream plasma or afterglow plasma) is a plasma processing method in which the plasma and material interaction occurs at a location remote from the plasma in the plasma afterglow.{{cite book|author1=Tommi Kääriäinen|author2=David Cameron|author3=Marja-Leena Kääriäinen|author4=Arthur Sherman|title=Atomic Layer Deposition: Principles, Characteristics, and Nanotechnology Applications|url=https://books.google.com/books?id=Yjeid_cf5AcC&pg=PA21|date=17 May 2013|publisher=Wiley|isbn=978-1-118-74742-1|pages=21–}}{{cite book|author=Alexander Fridman|title=Plasma Chemistry|url=https://books.google.com/books?id=ZzmtGEHCC9MC&pg=PA532|date=5 May 2008|publisher=Cambridge University Press|isbn=978-1-139-47173-2|pages=532–}}